Laser Scriber WSF4000
Fully Automatic Laser Scriber WSF4000
Opto System Fully Automatic WSF4000 Laser Scriber is designed to scribe wafers as part of the scribe and break singulation process.
The machine is equipped with a 355 nm laser that efficiently scribes Sapphire, GaN or Si wafers to be cleaved into bars or chips. The design includes a vision system with automatic functions that accurately moves wafers to the cut position. In addition, the machine incorporates numerous features to ensure high performance, safety and low cost of ownership.
The machine is equipped with a 355 nm laser that efficiently scribes Sapphire, GaN or Si wafers to be cleaved into bars or chips. The design includes a vision system with automatic functions that accurately moves wafers to the cut position. In addition, the machine incorporates numerous features to ensure high performance, safety and low cost of ownership.
Features
•Designed to support R & D and production environments•Vision System using multiple cameras to ensure accurate auto alignment
•Fully Automatic operation including automatic ring loading and unloading
•Performs precision thermal abrasing scribing using laser beams
•High accuracy scribing using auto alignment and auto focusing function
•Broken line scribing and marking using high speed shutter
•Robust safety features including safety shields and detectors
•Remote access with TeamViewer and Windows PC
•Virtually zero kerf allowing maximum die density
•Wafer size maximum 4 “ on a 6” frame
•Custom Design or Stock item
•Easy operation and menu set up
•Low cost of ownership
Specification
1. Wafer Table •Table φ170 mm (For maximum 4 inches wafer)
• Parallel ±0.010 mm/100mm Travel
• Wafer Ring Size 6-Inch Frame 2-6-1 (Disco Standard)
2. Laser Unit
• Laser Source 355nm Nano Second Laser
• Ave. Power 5W
3. Optical Unit
• X 100 Lens for Laser
• X20 Lens for Monitor & Alignment with Auto Focusing
4.Vision System
• Camera 1 for Wafer Positioning
• Camera 2 for Alignment with Auto Focusing
5. Controller
• PLC Control
• Parameters are input through the touch screen.
• A set of parameters is saved for each model as a recipe and read by selection.
• Maximum 20 recipes can be stored
6. Machine Body
• Laser Safety Level: Class 1
• Color: Opto Standard
7. Utilities
•Power Supply AC100V 1.2KVA
8. Size 1200(W) × 1300(D) × 6700(H) mm
9. Weight ・ Approx. 700 Kg
10.Signal Tower ・ 3 Color status signal tower
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