|Wafer Size||Within 3 inch|
|Chip Size||More than 0.2 mm|
②Target Wafer Ring
Entire surface of the machine is shielded by the covers.
When the front cover is opened, the break blade can not be moved.
If the front cover is opened during the auto operation, the machine will have 1 cycle stop.
When the break blade is at the down position, the work table and the support blade can not be moved.
The monitor TV etc. is fixed with a band or a metal fitting.