Suitable system to scribe the GaN wafer for the preparation to cleave into bars and chips.
②Optical system is installed under the stage as well so that the auto alignment can be done for the wafer that is difficult to see from the processed upper side.
③Also broken line scribe and the marking can be done with the high speed shutter.
Safety Solutions / Malfunction Detection
Machine has the safety measures and the malfunction detections as below.
Installation of the emergency stop switches
Implementation of the shields against the laser beam
Detect the air supply pressure drop
Detect the vacuum pressure drop