LD Breaker LDH-50TSR
Laser Diode Breaker LDH-50TSR
Opto System LDH-50TSR automatically cleaves pre-scribed laser diode wafers into bars or laser diode bars to chips. The maximum wafer size is 2 inches.
The machine is designed to process material mounted on a ring. The ring supporting the substrate to be cleaved is placed upside down on the holder; this allows the vision system to automatically recognize the structure and accurately align the wafer to the knife that cleaves the substrate from the back. . A support mechanism with an adjustable gap on the front side (scribed side) secures the structure and allow bending over the breaking street
The combination of these and other features ensures high quality mirror like facets, high yields, reliable machine performance and overall low cost of ownership.
Features
•Robust design, low maintenance, reliable high-performance machine •High precision/Versatile tool for R&D and Production
• Fully automatic operation mode
• Semi-Automatic operation mode
• Parameter saving and retrieval function for R&D and qualified production recipe
• Adjustable gap support to facilitate bending angle control
• Vision System using multiple cameras to ensure accurate auto alignment
• Remote access with TeamViewer • Windows 10 PC ,15” monitor and touch screen.
• Three-point pinching fixture for precision alignment and cleaving
• Adjustable pressure and touch-down position function from the first break to the last
Specification
1. LD Work ・Area Size 60mm x 60mm(For maximum 2 inches wafer)
・Chip Size Minimum 200 μm
・Wafer Set 6-Inch Frame (Disco Standard)
2. Frame Holder (θ Axis)
・Accuracy ±0.02°
・Frame Spring Clamp Fixture
3. X-Y Axis
・Speed Maximum 40mm/sec
・Accuracy ±0.005mm
4. Optical System/Vision Unit
・ High Magnification Camera located under the support
・ Low Magnification Camera located above the frame
5. Utilities ・Power Supply AC120V 500VA
6. Machine Size 650(W) × 700(D) × 1400(H) mm (Excluding a Signal Tower)
7. Machine Weight ・ Approx. 300 Kg
8. Signal Tower ・ 3 Color status signal tour
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